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FOUP – Wikipedia
FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. It is a specialised plastic enclosure designed to hold silicon wafers …
Source: en.wikipedia.org
Date Published: 1/3/2022
View: 3203
What is FOSB and FOUP? – High tech guide
What is FOSB and FOUP? · How many wafers can a FOUP hold? · Who makes FOUPs? · What is SMIF pod? · What is load port in semiconductor?
Source: high-tech-guide.com
Date Published: 1/9/2022
View: 6520
Korea’s only wafer transfer container company 3S Korea
The wafer carrier box used in moving from a wafer manufacturer to a semiconductor manufacturer is called a Front Opening Shipping Box (FOSB), …
Source: www.thelec.net
Date Published: 4/15/2021
View: 2707
FOUP,FOSB,Wafer SMIF Pod-Chung King Enterprise Co., Ltd.
FOUP,FOSB,Wafer SMIF Pod Able to protect, deliver and store wafer, prove safe protection during delivery and storage.
Source: www.ckplas.com
Date Published: 7/10/2021
View: 3747
12″ (300mm) Automatic Wafer Mover – FOUP to FOSB
Targeted for cost sensitive applications like R&D, test-assembly-packaging and application labs. Specifications: For up to 12″ (300mm) Wafers; Single Wafer FOUP …
Source: www.sps-international.com
Date Published: 2/29/2021
View: 6870
FOUP stocker Crystec Technology Trading GmbH
All these cassette, SMIF, FOSB and FOUP boxes have to be kept very clean. Therefore, they are stored in corresponding stockers. Foup Stocker …
Source: www.crystec.com
Date Published: 3/19/2021
View: 1062
FOUP cleaning – FOSB transportation: a challenge for …
With the advent of full minienvironment technology in mass production, FOUP (front opening unified pod) and FOSB (front opening shipping box) become …
Source: ieeexplore.ieee.org
Date Published: 1/25/2022
View: 8052
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주제에 대한 기사 평가 fosb vs foup
- Author: 4030jerome
- Views: 조회수 1,311회
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- Date Published: 2019. 11. 29.
- Video Url link: https://www.youtube.com/watch?v=Tr4ZciTFgXg
Wikipedia
Box used to store and transfer large semiconductor wafers
FOUP is an acronym for Front Opening Unified Pod[1] or Front Opening Universal Pod.[2]
It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement.[3] FOUPs began to appear along with the first 300mm wafer processing tools in the mid 1990s. The size of the wafers and their comparative lack of rigidity meant that SMIF was not a viable technology. FOUPs were designed with the constraints of 300mm in mind, with the removable cassette being replaced by fins in the FOUP which hold the wafers in place, and the bottom opening door being replaced by a front opening door to allow robot handling mechanisms to access the wafers directly from the FOUP. The weight of a fully loaded 25 wafer FOUP at around 9 kilograms means that automated material handling systems are essential for all but the smallest of fabrication plants. Pitch for 300mm Foup is 10mm. While 13 slot pitch can be up to 19mm but only 13 wafers[citation needed] To allow this, each FOUP has various coupling plates, pins and holes to allow the FOUP to be located on a load port, and to be manipulated by the AMHS (Automated Material Handling System). FOUPs may also contain RF tags that allow them to be identified by readers on tools, in the AMHS etc.[citation needed] FOUPs are available in several colors, depending on the customer’s wish. FOUPs and IC manufacturing equipment can have a nitrogen atmosphere, in an effort to increase device yield.[4][5]
FOSB [ edit ]
Front opening shipping box (front side)
FOSB is an acronym for Front Opening Shipping Box, is used for transferring wafers between manufacturing facilities.[1]
Manufacturers [ edit ]
Entegris
Marubeni
Pozzetta
Shin-Etsu Polymer
Gudeng Precision
Chung King Enterprise
Danichi Shoji
3S Korea
ESun system technology
Miraial
See also [ edit ]
References [ edit ]
What is FOSB and FOUP?
What is FOSB and FOUP?
How many wafers can a FOUP hold?
The Spectra FOUP holds 300 mm wafers safely and securely while they are transported and transferred 8 to 16 kilometers (5 to 10 miles) within the fab as they move through hundreds of sophisticated process steps.
Who makes FOUPs?
300 mm Front Opening Unified Pods (FOUPs) | Entegris.
What is SMIF pod?
The purpose of SMIF pods is to isolate wafers from contamination by providing a miniature environment with controlled airflow, pressure and particle count. … SMIF is typically used for wafers no larger than 200mm, the equivalent for 300mm wafers being the FOUP (Front Opening Unified Pod).
What is load port in semiconductor?
The RFID-based Smart Load Port (SLP) is a station for the manual input and output of 300mm FOUPs or 200mm SMIF pods into or out of an automatic overhead transport system in a semiconductor fab. The integrated RFID technology ensures automatic lot identification for during loading and unloading process.
Related questions
Related What is FOUP in semiconductor? FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement. Related How wafers are fabricated? The silicon wafers start out blank and pure. The circuits are built in layers in clean rooms. First, photoresist patterns are photo-masked in micrometer detail onto the wafers’ surface. The wafers are then exposed to short-wave ultraviolet light and the unexposed areas are thus etched away and cleaned. Related What is a load port? Port of Loading is a port or a place where goods are loaded aboard a ship, secured and ready to be transported. POL can also be called the port of exit. Related What is discharge port? Port of Discharge is a place where a vessel discharges or unloads some or all of its shipments. The shipments are, thereafter, dispatched to their various consignees. POD is also known as Port of Unloading (POU). Related What is port to port shipping? Port-to-port shipping refers to the middle leg of the shipping journey in which your items are transported via shipping containers from the port of loading to the port of discharge. This service does not include on-carriage and pre-carriage transportation services.May 18, 2021 Related Can you buy a silicon wafer? UniversityWafer, Inc. has a large selection of silicon wafers from the best manufacturers. High-quality combined with low cost means you save when you buy online. Silicon Process Test Wafers is one of the world’s largest suppliers of test silicon wafer testing equipment. Related Why are wafers round? The silicon ingots that are used to grow the wafer are circular in shape. This is due to the process of dipping a seed crystal into molten silicon and rotating and slowly extracting as the crystal grows. … Since the product is already circular in shape, the wafers are cut into that same shape.Oct 26, 2018 Related What are wafer shipping boxes and “FOUP”? Wafer manufacturers use wafer shipping boxes for wafer shipments, and device manufacturers use front opening unified pods (“FOUP”) to hold wafers during process handling. Shin-Etsu Polymer’s wafer shipping boxes and “FOUP” products have an excellent track record. Related What is a front Opening Unified Pod (FOUP)? FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. [2] It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement. [3] Related How does the FOUP purge system work? Especially while wafers stored in FOUPs are waiting for the next process step, the danger of these unwanted side reactions is very high.The FOUP Purge System by Fabmatics avoids oxidation and other chemical reactions on the wafer surface by purging the FOUP with an inert gas (e. g. N2) during interim storage. Related What is the weight of a 25 wafer FOUP? The weight of a fully loaded 25 wafer FOUP at around 9 kilograms means that automated material handling systems are essential for all but the smallest of fabrication plants.
FOUP Stocker
Cassette, SMIF, FOUP stocker FOUP stocker
Crystec Technology Trading GmbH
Cassette, SMIF, FOUP stocker
In semiconductor processing it is necessary to operate under very clean conditions. Therefore, production is done in a clean room. Silicon wafers are handled in special plastic cassettes. Still, people have to work in the clean room and although they have to wear special clean room clothes, they introduce particles in the clean room. In order to improve the cleanliness of the semiconductor production, a so called mini-environment has been introduced. This means that the wafers are no longer handled in open cassettes, but in closed, clean boxes which are only opened inside the processing equipment, e.g. a vertical furnace, a horizontal furnace, or an RTP tool. These are just a few examples.
200mm open cassette
200mm SMIF box
300mm FOSB box
300mm FOUP box
For 200mm wafers, either open cassette or SMIF boxes have been used. SMIF stands for S tandard M echanical I nter F ace and those boxes include an open cassette which is unloaded through the bottom of the SMIF pod. For 300mm silicon wafers, the design of the mini environment boxes has been changed and so called FOUP boxes ( F ront O pening U nified P od) are now state of the art. These boxes are opened from the front side and the equipment robot unloads the wafers directly from the FOUP. There are also more simple boxes available just for transport, so called FOSB ( F ront O pening S hipping B ox).
All these cassette, SMIF, FOSB and FOUP boxes have to be kept very clean. Therefore, they are stored in corresponding stockers.
Daesung Engineering FOUP Stocker
FOUP Stocker are systems that store and manage FOUPs. To keep the air in the stocker clean, HEPA filters( H igh- E fficiency P articulate A ir) are installed. Delivery of FOUPs can be achieved by an operator, an AGV ( A utomatic G uided V ehicle) or OHT ( O verhead H oist T ransport)
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